In the production of semiconductor industry, especially in the slurry transportation and distribution of CMP for chemical mechanical polishing, such as flow loop controller, internal air is usually required, which usually presents a cleaning problem in processing tools, but the use of precision Peristaltic pump The slurry will never be polluted in the pipeline.
precise Peristaltic pump It is suitable for various pipe sizes, high-tech pipes and new advanced pump head design to provide accurate, reliable and repeatable continuous fluid transmission for a long time.
Various pump pipe options and various high-performance pump heads can meet the challenging requirements of semiconductor production, including transporting tungsten and oxide slurry, deionized water and ammonium hydroxide. For these critical applications, it is ideal for "when performance is important".
